PROBLEM TO BE SOLVED: To provide a system for solidifying, evaporating and supplying a metal halogen compound for thin film deposition, capable of reduc...
A deployable member storage housing that can be easily produced is provided. A housing main body and a lid member covering the housing main body, the housing main body having a deployment member accommodating portion in which an upper...
Problem to be solved: to provide a solid evaporation supplying system for a metal halide compound for reducing particle contamination. Solution 100 for evaporating raw material 100 for storing and vaporizing metal forming metal halide...